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HK Home Products Guide Foundation Introductions
   
 
HK Since its inception in 1997 has been struggled to engineering and technology R&D, which has accumulated a considerable working experience, and we have most outstanding working team.
All principal staffs have a lot of experience in engineering, which ability is sure from industry. And we also did technical cooperation and exchanges with Ding-Li Civil structural technician business office, “Vibration Engineering Consultants, Taiwan”, “Prowave Engineering, INC”, LSP Consultants PTE LTD of Singapore, NewCom Company of USA, Etc…,which make Hsieh-kun become the most professional company of the both theory and experience.
 
  The bases do not need the vibration or rigid demand, but the weight is slightly heavy, so use Steel platform to spread the weight, and avoid the raised floor to sink.
 
Type Description To apply
A3 Concentrated load between 300~700kg/in2 Curing/Baking & Alloy (Cu), RPO & SiON - Frontend PRODUCER, HDP STI, SiN Dep, PR Asher (Frontend) - ETCH
A4 Concentrated load higher than 700kg/in2 &PR Coating (Cu), Seed/Barrier Dep (Cu), Metal Etch (AlCu)
 
  The bases do not need the vibration or rigid demand, but the weight is very heavy, the raised floor can not afford its weight, which has to reinforce under the steel platform.
 
Type Description To apply
B3 Implanter (loading over 700kg/in2) High Current Implanter, Medium Current Implanter
B4 Wet bench & CMP & Tube Cleaner (loading over 700 kG/in2) In-line Track, W CMP, Wet Bench, Tube Cleaner
 
  The bases need the vibration or rigid demand, or it is extremely sensitive to the displacement, which use the cement foundation to achieve the best results.
 
Type Description To apply
C2 CD-SEM (AMT,Hitachi) CD SEM, Inspection SEM
C3 Scanner In-line Scanner (DUV)
 
  The bases need the vibration or rigid demand, but its weight is not heavy, which use the pedestals to isolate the raised floor.
 
Type Description To apply
D2 Metrolog & Ispection SEM ADI, AEI, Defect Inspection
D3 Novellous, W plug W Plug Dep, Nevellous
 
  The bases need the vibration or rigid demand, and its weight is very heavy, which need the foundation to isolate the raised floor.
 
Type Description To apply
E3 Overlay-KLA Tancor & compass & Track Overlay
E4 Lam gas box Metal Etch gas box
E5 Pump on raised floor Pump Foundation
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