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| HK Since its inception in 1997 has been struggled to engineering and technology R&D, which has accumulated a considerable working experience, and we have most outstanding working team. |
| All principal staffs have a lot of experience in engineering, which ability is sure from industry. And we also did technical cooperation and exchanges with Ding-Li Civil structural technician business office, “Vibration Engineering Consultants, Taiwan”, “Prowave Engineering, INC”, LSP Consultants PTE LTD of Singapore, NewCom Company of USA, Etc…,which make Hsieh-kun become the most professional company of the both theory and experience. |
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The bases do not need the vibration or rigid demand, but the weight is slightly heavy, so use Steel platform to spread the weight, and avoid the raised floor to sink. |
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| Type |
Description |
To apply |
| A3 |
Concentrated load between 300~700kg/in2 |
Curing/Baking & Alloy (Cu), RPO & SiON - Frontend PRODUCER, HDP STI, SiN Dep, PR Asher (Frontend) - ETCH |
| A4 |
Concentrated load higher than 700kg/in2 |
&PR Coating (Cu), Seed/Barrier Dep (Cu), Metal Etch (AlCu) |
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The bases do not need the vibration or rigid demand, but the weight is very heavy, the raised floor can not afford its weight, which has to reinforce under the steel platform. |
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| Type |
Description |
To apply |
| B3 |
Implanter (loading over 700kg/in2) |
High Current Implanter, Medium Current Implanter |
| B4 |
Wet bench & CMP & Tube Cleaner (loading over 700 kG/in2) |
In-line Track, W CMP, Wet Bench, Tube Cleaner |
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The bases need the vibration or rigid demand, or it is extremely sensitive to the displacement, which use the cement foundation to achieve the best results. |
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| Type |
Description |
To apply |
| C2 |
CD-SEM (AMT,Hitachi) |
CD SEM, Inspection SEM |
| C3 |
Scanner |
In-line Scanner (DUV) |
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The bases need the vibration or rigid demand, but its weight is not heavy, which use the pedestals to isolate the raised floor. |
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| Type |
Description |
To apply |
| D2 |
Metrolog & Ispection SEM |
ADI, AEI, Defect Inspection |
| D3 |
Novellous, W plug |
W Plug Dep, Nevellous |
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The bases need the vibration or rigid demand, and its weight is very heavy, which need the foundation to isolate the raised floor. |
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| Type |
Description |
To apply |
| E3 |
Overlay-KLA Tancor & compass & Track |
Overlay |
| E4 |
Lam gas box |
Metal Etch gas box |
| E5 |
Pump on raised floor |
Pump Foundation |
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Copyright © Hsieh-Kun Co., LTD. 2008, All Rights Reserved.
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Website design by fansio |
TEL : 886-3-5305050 ADDRESS : No.1, Huajiang St., HsinChu City 300, Taiwan (R.O.C.) |
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